Course Description
Conventional and emerging nano-manufacturing techniques and their applications in the fabrication of various structures and devices. Review of techniques for patterning, deposition, and etching of thin films including emerging techniques such as an imprint and soft lithography and other unconventional techniques. Electronic and mechanical properties of 0 to 3-D nanostructures and their applications in nano-electronics, MEMS/NEMS devices, sensing, energy harvesting, storage, flexible electronics and nano-medicine. Credit for both ECE/CHE 468 and ECE/CHE 568 is not allowed.
Type
Dual Level Course
Fall 2025
Instructors
Meeting Patterns
Classes Start:
August 18, 2025
Classes End:
December 2, 2025
Location:
01010 Engineering Building I
Class Days:
M W
Class Start Time:
1:30pm
Class End Time:
2:45pm
Class Type:
Lecture
Credits:
3.00
Restrictions:
Prerequisite: E 304
