Course Description
Introduction to physical theory, process design, analysis, and characterization of micro/nano scale fabrication and manufacturing. The main focus of the course is on the fabrication/manufacturing of important types of microstructures used in micro/nano devices and the techniques and tools used to fabricate and characterize them.
Spring 2025
Instructors
Meeting Patterns
Classes Start:
January 6, 2025
Classes End:
April 22, 2025
Location:
04134 Fitts-Woolard Hall
Class Days:
M W
Class Start Time:
10:15am
Class End Time:
11:30am
Class Type:
Lecture
Credits:
3.00
Restrictions:
None
